The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2016

Filed:

Jun. 23, 2015
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Brian A. Bryce, Chevy Chase, MD (US);

Josephine B. Chang, Mahopac, NY (US);

Marcelo A. Kuroda, Auburn, AL (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 41/08 (2006.01); H01L 41/083 (2006.01); H01L 41/314 (2013.01); H01L 41/18 (2006.01); H01L 41/047 (2006.01); H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0805 (2013.01); H01L 41/047 (2013.01); H01L 41/083 (2013.01); H01L 41/183 (2013.01); H01L 41/1875 (2013.01); H01L 41/1876 (2013.01); H01L 41/314 (2013.01);
Abstract

A method of forming a piezoelectronic transistor (PET), the PET, and a semiconductor device including the PET are described. The method includes forming a piezoelectric (PE) element with a trench and forming a pair of electrodes on the PE element in a coplanar arrangement in a first plane, both of the pair of electrodes being on a same side of the PE element. The method also includes forming a piezoresistive (PR) element above the pair of electrodes and forming a clamp above the PR element. Applying a voltage to the pair of electrodes causes displacement of the PE element perpendicular to the first plane.


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