The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2016
Filed:
Mar. 07, 2008
Jeffrey A. Brodine, Los Gatos, CA (US);
Domingo Guerra, Palo Alto, CA (US);
Whitney B. Kroetz, Hutto, TX (US);
Jeffrey A. Brodine, Los Gatos, CA (US);
Domingo Guerra, Palo Alto, CA (US);
Whitney B. Kroetz, Hutto, TX (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of the present invention relates to high temperature anti-droop end effectors for transferring semiconductor substrates. One embodiment of the present invention provides an end effector for using with a substrate handler. The end effector comprises a free end having a substrate supporting plane configured to support a substrate and positioned that substrate at a first angle relative to a horizontal plane. The end effector comprises a fixed end configured to be mounted to the substrate handler, wherein the end effector is mounted to the substrate handler at a position that the substrate supporting plane is at a second angle relative to the horizontal plane when no substrate is disposed on the free end, and the first angle is different from the second angle.