The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2016
Filed:
Jul. 06, 2015
Applicant:
Hirata Corporation, Shinagawa-ku, Tokyo, JP;
Inventors:
Junji Takano, Tokyo, JP;
Hiroya Mitsushima, Tokyo, JP;
Assignee:
HIRATA CORPORATION, Shinagawa-Ku, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02274 (2013.01);
Abstract
A conveyance system according to the present invention includes a processing station, first to third conveyance apparatuses arranged in a conveying direction of a work piece. The second conveyance apparatus is provided in the station. The system further includes a lifting apparatus disposed below the second conveyance apparatus in the station, and a processing apparatus in the processing station. The first and second conveyance apparatuses perform returning of the pallet that is empty in a direction reverse to the conveyance direction.