The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2016

Filed:

Oct. 17, 2012
Applicant:

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., Munich, DE;

Inventors:

Henry Morgner, Dresden, DE;

Gösta Mattausch, Ullersdorf, DE;

Christoph Metzner, OT Pappritz, DE;

Michael Junghähnel, Dresden, DE;

Rainer Labitzke, Dresden, DE;

Lars Klose, OT Weiβig, DE;

Torsten Werner, Dresden, DE;

Jörg Kubusch, Dresden, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 7/24 (2006.01); H01J 37/32 (2006.01); H05H 1/48 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32568 (2013.01); H01J 37/32055 (2013.01); H01J 37/32064 (2013.01); H01J 37/32596 (2013.01); H01J 37/32669 (2013.01); H01J 37/32807 (2013.01); H05H 1/48 (2013.01); H01J 2237/0822 (2013.01); H01J 2237/152 (2013.01); H01J 2237/327 (2013.01);
Abstract

An apparatus for generating a hollow cathode arc discharge plasma, including two plasma sources, each including a hollow cathode and an electrode which is associated with the hollow cathode and which has an opening that extends through the electrode, wherein the hollow cathodes of the two plasma sources are connected to a pulse generator which generates a bipolar, medium-frequency pulsed voltage between the two hollow cathodes. Here, in each of the two plasma sources, the hollow cathode is connected in an electrically conducting manner, directly or with interconnection of at least one current direction limiting component, to the associated electrode.


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