The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2016

Filed:

Mar. 13, 2013
Applicant:

Analog Devices, Inc., Norwood, MA (US);

Inventors:

Matthew Aaron Hazel, Malden, MA (US);

James Wilson, Foxborough, MA (US);

Colm Prendergast, Cambridge, MA (US);

Daniel Boyko, Norwood, MA (US);

Benoit Dufort, Stoneham, MA (US);

Assignee:

Analog Devices, Inc., Norwood, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 21/00 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01P 21/00 (2013.01); G01P 15/125 (2013.01);
Abstract

Determining if a hermetically sealed MEMs device loses hermeticity during operation. In one embodiment, the MEMs device is an accelerometer. A test signal having an associated frequency above an operational frequency range for the accelerometer is provided to the accelerometer at an input during operation of the accelerometer for sensing an acceleration. The output signal of the accelerometer is filtered at least above the operational frequency range of the accelerometer producing a test output signal. The test output signal is then compared to a predetermined threshold to determine if the amplitude of the test output signal differs from the threshold. If the amplitude of the test output signal differs from the predetermined threshold, an error signal is produced indicating that hermeticity of the accelerometer has been lost.


Find Patent Forward Citations

Loading…