The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2016
Filed:
May. 28, 2015
Pixtronix, Inc., San Diego, CA (US);
Sharp Corporation, Sharp Kabushiki Kaisha, Osaka OT, JP;
Teruo Sasagawa, Los Gatos, CA (US);
Junghun Chae, Newton, MA (US);
Jasper Lodewyk Steyn, Campbell, CA (US);
Takeshi Hara, Shirakicho, JP;
Asahi Yamato, Shirakicho, JP;
Pixtronix, Inc., San Diego, CA (US);
Sharp Corporation, Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
This disclosure provides systems, methods and apparatus including devices that include layers of passivation material covering at least a portion of an exterior surface of a thin film component within a microelectromechanical device. The thin film component may include an electrically conductive layer that connects via an anchor to a conductive surface on a substrate. The disclosure further provides processes for providing a first layer of passivation material on an exterior surface of a thin film component and for electrically connecting that thin film component to a conductive surface on a substrate. The disclosure further provides processes for providing a second layer of passivation material on any exposed surfaces of the thin film component after release of the microelectromechanical device.