The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2016
Filed:
Aug. 05, 2013
Applicant:
Imec, Leuven, BE;
Inventors:
Christoph Adelmann, Wilsele, BE;
Malgorzata Jurczak, Leuven, BE;
Assignee:
IMEC, Leuven, BE;
Primary Examiner:
Int. Cl.
CPC ...
H01L 45/00 (2006.01); C08K 3/08 (2006.01); C08K 3/04 (2006.01); C23C 16/32 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
H01L 45/147 (2013.01); C08K 3/04 (2013.01); C08K 3/08 (2013.01); C23C 16/32 (2013.01); C23C 16/40 (2013.01); C23C 16/45529 (2013.01); C23C 16/45531 (2013.01);
Abstract
The present disclosure relates generally to Hf-comprising materials for use in, for example, the insulator of a RRAM device, and to methods for making such materials. In one aspect, the disclosure provides a method for the manufacture of a layer of material over a substrate, said method including wherein X is a halogen selected from Cl, Br, I and F and is preferably Cl.