The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2016
Filed:
Jul. 25, 2014
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Anthony De Luca, Claix, FR;
Christelle Charpin-Nicolle, Fontanil-Cornillon, FR;
Abstract
A method of manufacturing a spacer for an electronic memory including a substrate; a first gate structure; a stack including a plurality of layers whereof at least one of the layers is able to store electric charges, the method including depositing a spacer material layer, at least on the area covered by the stack; ion beam machining the spacer material layer, the ion beam machining being carried out with controlled stopping so as to preserve a residual portion of the thickness of the spacer material layer covering the stack; plasma etching the residual portion of the thickness of the spacer material layer.