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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9437460 B1

PDFFull Text
Date of Patent:
Sep. 06, 2016

Filed:

Mar. 23, 2015

Method for manufacturing semiconductor device

Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Naoki Yoshimatsu, Tokyo, JP;

Kiyohiro Uchida, Tokyo, JP;

Taketoshi Shikano, Tokyo, JP;

Masayoshi Shinkai, Tokyo, JP;

Assignee:

Mitsubishi Electric Corporation, Tokyo, JP;

Attorney:

Studebaker & Brackett PC

Primary Examiner:

Zandra Smith

Assistant Examiner:

Evan Clinton

Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/48 (2006.01); H01L 21/56 (2006.01); H01L 23/498 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 21/50 (2006.01); H01L 23/373 (2006.01);
U.S. Cl.
CPC ...
H01L 21/4853 (2013.01); H01L 21/50 (2013.01); H01L 21/56 (2013.01); H01L 23/3121 (2013.01); H01L 23/49811 (2013.01); H01L 24/83 (2013.01); H01L 23/3735 (2013.01); H01L 23/49861 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/83801 (2013.01); H01L 2924/13055 (2013.01); H01L 2924/13091 (2013.01);
Abstract

Entry of resin into a cylindrical electrode can be suppressed without excessively increasing the number of parts and without unnecessarily damaging members. For this purpose, a semiconductor chip and a cylindrical electrode are mounted on one main surface of substrate. The substrate, the semiconductor chip, and the cylindrical electrode are sealed with resin material such that the cylindrical electrode has one end mounted to the substrate and the other opposite end at least exposed. After the step of sealing, an opening extending from the other end of the cylindrical electrode to a cavity in the cylindrical electrode is formed. Before performing the step of forming an opening, the other end of the cylindrical electrode is closed.

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