The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2016

Filed:

Sep. 07, 2012
Applicant:

Takumi Ota, Kanagawa-ken, JP;

Inventor:

Takumi Ota, Kanagawa-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B29C 59/02 (2006.01); B29C 33/30 (2006.01); B29C 43/18 (2006.01); B29C 43/02 (2006.01); G03F 7/00 (2006.01); B29C 35/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02 (2013.01); B29C 33/30 (2013.01); B29C 43/021 (2013.01); B29C 43/18 (2013.01); G03F 7/0002 (2013.01); B29C 2035/0827 (2013.01);
Abstract

A pattern forming device uses a template having a plurality of protrusions and recesses configured to imprint a reverse image thereof on a resin on a substrate. The pattern forming device has a holding part, a stage, a driving part, and a curing part. The holding part includes a contact portion having a friction reducing contact portion, which is configured to engage against the template to hold the template. The stage carries the substrate. The driving part is configured to move at least one of the holding part and the stage to have the pattern in contact with the resin. The curing part cures the resin. The contact portion has a main body portion configured to move forward/backward with respect to the template and a tip portion arranged on the main body portion.


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