The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2016

Filed:

Jun. 10, 2013
Applicant:

Freescale Semiconductor, Inc., Austin, TX (US);

Inventors:

Tab A. Stephens, Austin, TX (US);

Perry H. Pelley, Austin, TX (US);

Michael B. McShane, Austin, TX (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/12 (2006.01); H01L 21/44 (2006.01); G02B 6/136 (2006.01); G02B 6/35 (2006.01);
U.S. Cl.
CPC ...
G02B 6/136 (2013.01); G02B 6/3566 (2013.01); G02B 6/3502 (2013.01); G02B 6/357 (2013.01); G02B 6/3562 (2013.01); G02B 6/3584 (2013.01); G02B 6/3588 (2013.01); G02B 6/3596 (2013.01);
Abstract

A high density, low power, high performance information system, method and apparatus are described in which an integrated circuit apparatus includes a plurality of deflectable MEMS optical beam waveguides (e.g.,) at each die edge which are each formed with an optical beam structure () which is encapsulated by a waveguide beam structure () to extend into a deflection cavity () and which is surrounded by a plurality of deflection electrodes (-) that are positioned on walls of the deflection cavity () to provide two-dimensional deflection control of each deflectable MEMS optical beam waveguide in response to application of one or more deflection voltages to provide optical communications (e.g.,) between different die.


Find Patent Forward Citations

Loading…