The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2016

Filed:

Sep. 23, 2015
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Andrew T. Kim, Poughkeepsie, NY (US);

Cathryn J. Christiansen, Huntington, VT (US);

Ping-Chuan Wang, Hopewell Junction, NY (US);

Assignee:

GlobalFoundries, Inc., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); G01R 31/28 (2006.01); H01L 23/528 (2006.01); H01L 23/522 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2884 (2013.01); H01L 22/30 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01);
Abstract

Aspects of the present disclosure provide an integrated circuit (IC) test structure. An IC structure according to the present disclosure can include: a monitor chain having a first end electrically connected to a second end through a plurality of metal wires each positioned within one of a first metal level and a second metal level, wherein the first metal level is vertically separated from the second metal level; a first test wire positioned within the first metal level and extending in a first direction, wherein the first test wire is electrically insulated from the monitor chain; and a second test wire positioned within the second metal level and extending in a second direction, wherein the second test wire is electrically insulated from the monitor chain and the first test wire, and wherein the first direction is different from the second direction.


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