The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2016

Filed:

Jun. 15, 2010
Applicant:

Lukas Willem Snyman, Faerie Glen, ZA;

Inventor:

Lukas Willem Snyman, Faerie Glen, ZA;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/15 (2006.01); G01P 15/093 (2006.01); G01D 5/26 (2006.01); G01F 1/28 (2006.01); G01N 21/77 (2006.01); G02B 6/12 (2006.01); G02B 6/42 (2006.01);
U.S. Cl.
CPC ...
G01P 15/093 (2013.01); G01D 5/266 (2013.01); G01F 1/28 (2013.01); G01N 21/7703 (2013.01); G02B 6/12004 (2013.01); G01N 21/7746 (2013.01); G02B 6/4246 (2013.01); H01L 27/15 (2013.01);
Abstract

The present invention relates to a sensor device. More particularly, the invention relates to a CMOS-based micro-optical-electromechanical-sensor (MOEMS) device with silicon light emitting devices, silicon waveguides and silicon detectors being fabricated using current Complementary Metal Oxide Semiconductor (CMOS) technology or Silicon on Insulator (SOI) technology. According to the invention there is provided a sensor comprising: a Silicon-based light emitting structure; an integrated electro-optical mechanical interface structure that is capable to sense mechanical deflections; an integrated electronic driving and processing circuitry so as to detect physical parameters such as vibration, motion, rotation, acceleration.


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