The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2016
Filed:
Apr. 16, 2013
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Keiji Emoto, Saitama, JP;
Naoki Maruyama, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G01B 11/27 (2006.01); G01B 7/00 (2006.01); H01L 21/67 (2006.01); H05K 3/00 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G01B 11/27 (2013.01); G01B 7/00 (2013.01); G03F 7/0002 (2013.01); H01L 21/67259 (2013.01); H05K 3/0008 (2013.01); H05K 2203/166 (2013.01);
Abstract
A position measuring apparatus configured to measure a position of an measured object using a plate-like scale including a grating pattern, includes a supporting unit configured to be arranged between a structure and the scale and to support the scale, in which the supporting unit includes a spring element that reduces vibration transferred from the structure to the scale in a plate thickness direction.