The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2016
Filed:
May. 06, 2013
Applicant:
Eric R. Dickey, Portland, OR (US);
Inventor:
Eric R. Dickey, Portland, OR (US);
Assignees:
Lotus Applied Technology, LLC, Hillsboro, OR (US);
Toppan Printing Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/54 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45536 (2013.01); C23C 16/45548 (2013.01); C23C 16/45555 (2013.01); C23C 16/545 (2013.01); H01J 37/32027 (2013.01); H01J 37/3277 (2013.01); H01J 37/32091 (2013.01); H01J 37/32357 (2013.01); H01J 37/32449 (2013.01); H01J 37/32513 (2013.01); H01J 37/32541 (2013.01); H01J 37/32568 (2013.01);
Abstract
A system for depositing a thin film on a flexible substrate comprises a plurality of processing zones spaced apart by an isolation zone, a plasma generator for generating a plasma region proximal to a pathway along which the substrate travels, and a substrate transport mechanism for guiding the substrate back and forth between the processing zones so that the substrate is transported past and exposed to the plasma region when the system is in use.