The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2016

Filed:

Apr. 02, 2015
Applicant:

Tanaka Kikinzoku Kogyo K.k., Tokyo, JP;

Inventors:

Yasuyuki Goto, Tsukuba, JP;

Yasunobu Watanabe, Tsukuba, JP;

Yusuke Kobayashi, Tsukuba, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); H01J 37/34 (2006.01); C23C 14/34 (2006.01); B22F 3/15 (2006.01); C22C 1/05 (2006.01); C22C 5/04 (2006.01); C22C 19/07 (2006.01); G11B 5/851 (2006.01); C22C 1/04 (2006.01); C22C 32/00 (2006.01); B22F 3/14 (2006.01); B22F 5/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); B22F 3/14 (2013.01); B22F 3/15 (2013.01); B22F 5/00 (2013.01); C22C 1/0433 (2013.01); C22C 1/05 (2013.01); C22C 5/04 (2013.01); C22C 19/07 (2013.01); C22C 32/001 (2013.01); C23C 14/35 (2013.01); G11B 5/851 (2013.01); H01J 37/3429 (2013.01);
Abstract

A target for magnetron sputtering, comprising metal Co, metal Cr, and an oxide with an atomic ratio of the metal Cr to the total of the metal Co and the metal Cr being less than 25 at %, wherein the target comprises: a non-magnetic metal phase containing metal Co and metal Cr with an atomic ratio of the metal Cr to the total of the metal Co and the metal Cr being 25 at % or more and with an atomic ratio of the metal Co to the total of the metal Co and the other metals being more than 0 at % and 45 at % or less; and a magnetic metal phase containing metal Co, wherein a volume ratio of the oxide to the non-magnetic metal phase is more than 0 and 1.2 or less, and wherein the non-magnetic metal phase and the oxide are mutually dispersed.


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