The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2016
Filed:
Mar. 10, 2015
Seiko Epson Corporation, Tokyo, JP;
Takahiko Yoshizawa, Sakata, JP;
SEIKO EPSON CORPORATION, Tokyo, JP;
Abstract
A present MEMS device includes: a substrate; a functional element that is provided on a surface of the substrate; a structural member that is provided on the surface of the substrate and forms a cavity surrounding the functional element; a first lid portion that is provided with an opening and covers a part of the cavity in such a manner that a gap is present between the first lid portion and the functional element; a receiving portion that is provided between a plurality of electrodes or a plurality of units of wiring on the surface of the substrate and has a receiving face opposing the cozening of the first lid portion via a gap; and a second lid portion including an electrically conductive sealing portion that seals the opening of the first lid portion.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile