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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9431489 B1

PDFFull Text
Date of Patent:
Aug. 30, 2016

Filed:

Feb. 27, 2015

β-ga2o3-based single crystal substrate

Applicants:

Tamura Corporation, Tokyo, JP;

Koha Co., Ltd., Tokyo, JP;

Inventors:

Kimiyoshi Koshi, Tokyo, JP;

Shinya Watanabe, Tokyo, JP;

Masaru Takizawa, Tokyo, JP;

Yu Yamaoka, Tokyo, JP;

Makoto Watanabe, Tokyo, JP;

Takekazu Masui, Tokyo, JP;

Assignees:

TAMURA CORPORATION, Tokyo, JP;

KOHA CO., LTD., Tokyo, JP;

Attorney:

McGinn IP Law Group PLLC

Primary Examiner:

Whitney T Moore

Int. Cl.
CPC ...
H01L 29/04 (2006.01); H01L 29/24 (2006.01); C01G 15/00 (2006.01); C03B 29/16 (2006.01); C30B 29/16 (2006.01); H01L 21/02 (2006.01); H01L 33/00 (2010.01); H01L 33/32 (2010.01);
U.S. Cl.
CPC ...
H01L 29/24 (2013.01); C01G 15/00 (2013.01); C30B 29/16 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02414 (2013.01); H01L 21/02458 (2013.01); H01L 21/02576 (2013.01); H01L 33/007 (2013.01); H01L 33/32 (2013.01);
Abstract

A β-GaO-based single crystal substrate includes an average dislocation density of less than 7.31×10cm. The average dislocation density may be not more than 6.14×10cm. The substrate may further include a main surface including a plane orientation of (−201), (101) or (001). The substrate may be free from any twinned crystal.

Find Patent Forward Citations

Koshi, Kimiyoshi. (2016). β-ga2o3-based single crystal substrate (U.S. Patent No. 9431489). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9431489

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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