The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2016
Filed:
Mar. 26, 2013
Shimadzu Corporation, Kyoto-shi, Kyoto, JP;
Tohoku University, Sendai-shi, Miyagi, JP;
Hideki Tominaga, Uji, JP;
Ryuta Hirose, Kizugawa, JP;
Kenji Takubo, Uji, JP;
Shigetoshi Sugawa, Sendai, JP;
Rihito Kuroda, Sendai, JP;
SHIMADZU CORPORATION, Kyoto, JP;
TOHOKU UNIVERSITY, Sendai, JP;
Abstract
A plurality of photodiodes arrayed in a one-dimensional form are divided into a plurality of groups. The structure of an antireflection coating is changed for each group so that all the surfaces of the photodiodes belonging to each group are covered with an antireflection coating having a transmittance characteristic which shows a maximum transmittance within a range of wavelengths of light to be received by those photodiodes. In particular, a SiOcoating layer on the silicon substrate and an AlOcoating layer are common to all the photodiodes, while the structure of the upper layers are modified with respect to the wavelength. Within an ultraviolet wavelength region, the coating structure is more finely changed with respect to the wavelength. By such a design, the transmittance can be improved while making the best efforts to avoid a complex manufacturing process.