The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2016
Filed:
Apr. 29, 2014
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Eugenijus Norkus, Vilnius, LT;
Ina Stankeviciene, Vilnius, LT;
Aldona Jagminiene, Vilnius, LT;
Aniruddha Joi, Fremont, CA (US);
Loreta Tamasauskaite-Tamasiunaite, Vilnius, LT;
Yezdi Dordi, Palo Alto, CA (US);
Zita Sukackiene, Vilnius, LT;
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/31 (2006.01); C23C 18/16 (2006.01); H01L 21/288 (2006.01);
U.S. Cl.
CPC ...
C23C 18/31 (2013.01); C23C 18/165 (2013.01); H01L 21/288 (2013.01);
Abstract
A solution for electroless deposition of cobalt is provided. A reducing agent of Tiions is provided to the solution. Coions are provided to the solution.