The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2016
Filed:
Mar. 23, 2015
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Tetsuya Isshiki, Shiojiri, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01); H01L 41/187 (2006.01); B41J 2/14 (2006.01); H01L 41/09 (2006.01); B41J 2/16 (2006.01); H01L 41/318 (2013.01);
U.S. Cl.
CPC ...
H01L 41/0815 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1645 (2013.01); B41J 2/1646 (2013.01); H01L 41/0973 (2013.01); H01L 41/1878 (2013.01); H01L 41/318 (2013.01);
Abstract
A piezoelectric element including a first electrode, a piezoelectric body layer, and a second electrode, in which a seed layer, which performs control such that the piezoelectric body layeris preferentially oriented with respect to a specific crystal plane, is formed between the first electrodeand the piezoelectric body layer, and the seed layeris formed from a composite oxide with a perovskite structure that includes at least Bi, Sr, Fe and Ti and an element ratio of Bi, Sr, Fe, and Ti in the seed layer satisfies the Formula (1) below.Bi:Sr:Fe:Ti=·(1−)::1−  (1)