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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9425334 B1

PDFFull Text
Date of Patent:
Aug. 23, 2016

Filed:

Sep. 06, 2011

Methods and apparatus for patterning photovoltaic devices and materials for use with such devices

Applicants:

Brian W. Baird, Portland, OR (US);

Timothy D. Gerke, Portland, OR (US);

Inventors:

Brian W. Baird, Portland, OR (US);

Timothy D. Gerke, Portland, OR (US);

Assignee:

Fianium Ltd, Southampton, GB;

Attorney:

Peter J. Rainville

Primary Examiner:

Angel Roman

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/0236 (2006.01); B23K 26/073 (2006.01); H01L 21/268 (2006.01); H01L 31/073 (2012.01); H01L 31/0749 (2012.01); H01L 21/78 (2006.01); H01L 31/18 (2006.01); H01L 31/046 (2014.01); H01L 31/0463 (2014.01); B23K 26/40 (2014.01); B23K 26/06 (2014.01);
U.S. Cl.
CPC ...
H01L 31/0236 (2013.01); B23K 26/0624 (2015.10); B23K 26/0732 (2013.01); B23K 26/364 (2015.10); B23K 26/40 (2013.01); H01L 21/268 (2013.01); H01L 21/78 (2013.01); H01L 31/046 (2014.12); H01L 31/0463 (2014.12); H01L 31/073 (2013.01); H01L 31/0749 (2013.01); H01L 31/18 (2013.01); B23K 26/0635 (2013.01); B23K 2203/172 (2015.10); Y02E 10/543 (2013.01);
Abstract

A picosecond laser beam shaping assembly is disclosed for shaping a picosecond laser beam for use in patterning (e.g., scribing) semiconductor devices. The assembly comprises a pulsed fibre laser source of picosecond laser pulses, a harmonic conversion element for converting laser pulses at a first laser wavelength having a first spectral bandwidth to laser pulses at a second laser wavelength having a second spectral bandwidth, and a beam shaping apparatus for shaping the laser beam at the second laser wavelength, the beam shaping apparatus having a spectral bandwidth that substantially corresponds to the second spectral bandwidth so as to produce a laser beam having a substantially rectangular cross-sectional profile.

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