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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9425029 B1

PDFFull Text
Date of Patent:
Aug. 23, 2016

Filed:

Jan. 15, 2015

Processing apparatus having a first shield and a second shield arranged to sandwich a substrate

Applicant:

Canon Anelva Corporation, Kawasaki-shi, JP;

Inventors:

Yoshihiro Muto, Kawasaki, JP;

Ryuji Higashisaka, Kawasaki, JP;

Satoshi Yamada, Kawasaki, JP;

Assignee:

CANON ANELVA CORPORATION, Kawasaki-Shi, Kanagawa-Ken, JP;

Attorney:

Buchanan Ingersoll & Rooney PC

Primary Examiner:

Binu Thomas

Int. Cl.
CPC ...
C23C 16/54 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); C23C 14/34 (2006.01); C23C 14/04 (2006.01); H01J 37/34 (2006.01); C23C 14/56 (2006.01); H01J 37/32 (2006.01); B05C 13/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3441 (2013.01); C23C 14/042 (2013.01); C23C 14/34 (2013.01); C23C 14/564 (2013.01); H01J 37/32651 (2013.01); H01J 37/3447 (2013.01); B05C 13/02 (2013.01); C23C 14/568 (2013.01); C23C 16/54 (2013.01);
Abstract

A processing apparatus includes a supply source including a first supply source and a second supply source arranged to respectively face a first surface of a substrate and a second surface on an opposite side of the first surface. The supply source is configured to supply a material to apply a process to the substrate. A shield member includes a first shield provided around the first supply source and a second shield provided around the second supply source, the first shield and the second shield being arranged to sandwich the substrate. A moving device is configured to move the first shield and the second shield to set one of a close state in which the first shield and the second shield are close to each other and a separate state in which the first shield and the second shield are separate from each other.

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