logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9423698 B1

PDFFull Text
Date of Patent:
Aug. 23, 2016

Filed:

May. 15, 2015

Illumination optical apparatus and projection exposure apparatus

Applicant:

Nikon Corporation, Tokyo, JP;

Inventor:

Naomasa Shiraishi, Saitama, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Christina Riddle

Int. Cl.
CPC ...
G03B 27/72 (2006.01); G03B 27/68 (2006.01); G03B 27/52 (2006.01); G03B 27/54 (2006.01); G03F 7/20 (2006.01); G02B 27/28 (2006.01); G02B 3/00 (2006.01); G02B 5/30 (2006.01); G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70191 (2013.01); G02B 3/0006 (2013.01); G02B 5/3083 (2013.01); G02B 27/28 (2013.01); G02B 27/283 (2013.01); G03F 7/70108 (2013.01); G03F 7/70341 (2013.01); G03F 7/70566 (2013.01); G03F 7/70966 (2013.01);
Abstract

An illumination optical apparatus illuminates an object with illumination light. The apparatus includes a birefringent member having different thicknesses of a birefringent material at different incidence positions such that illumination light incident on the birefringent member in a first linear polarization state having a single polarization direction is in a second linear polarization state on a pupil plane, the second linear polarization state having a polarization direction being substantially coincident with a circumferential direction about an optical axis of the illumination optical apparatus.

Find Patent Forward Citations

Quick Actions:

Shiraishi, Naomasa. (2016). Illumination optical apparatus and projection exposure apparatus (U.S. Patent No. 9423698). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9423698

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…