The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2016
Filed:
May. 28, 2013
Thales, Neuilly-sur-Seine, FR;
Regis Quer, Saint Peray, FR;
Yann Planchette, Valence, FR;
Jean-Michel Muguet, Rochefort-Samson, FR;
Thales, Courbevoie, FR;
Abstract
The invention relates to vibrating micro-systems, and notably but not exclusively to pressure, acceleration, or angular speed micro-sensors with a resonator in an evacuated cavity. The resonator () with a vibrating element is placed in an oscillating circuit controlled by a closed-loop control, the oscillating circuit supplying an oscillating signal y(t) at a resonance frequency Fp representing the measurement of a physical quantity. The resonance frequency is calculated by counting pulses over a time window. The sensor furthermore comprises means for calculating a continuity parameter Pc representing the variations in the result of the calculation of the resonance frequency over the course of the successive time windows, and means for comparing the parameter Pc with a threshold in order to deduce from this information on the degradation of the precision of the sensor.