The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 23, 2016

Filed:

Nov. 10, 2011
Applicants:

Pehr E Pehrsson, Fairfax Station, VA (US);

Chistopher Field, Alexandria, VA (US);

Hyun Jin IN, Alexandria, VA (US);

Inventors:

Pehr E Pehrsson, Fairfax Station, VA (US);

Chistopher Field, Alexandria, VA (US);

Hyun Jin In, Alexandria, VA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/00 (2006.01); G01F 25/00 (2006.01); B82Y 10/00 (2011.01); B82Y 15/00 (2011.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); H01L 29/06 (2006.01); G01N 27/12 (2006.01); G01R 1/067 (2006.01);
U.S. Cl.
CPC ...
B82Y 10/00 (2013.01); B82Y 15/00 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); G01N 27/127 (2013.01); H01L 29/0665 (2013.01); H01L 29/0676 (2013.01); G01R 1/06744 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Disclosed herein is a structure having: a support, a plurality of nanowires perpendicular to the support, and an electrode in contact with a first end of each nanowire. Each nanowire has a second end in contact with the support. The electrode contains a plurality of perforations. The electrode contains a plurality of perforations. Also disclosed herein is a method of: providing the above support and nanowires; depositing a layer of a filler material that covers a portion of each nanowire and leaves a first end of each nanowire exposed; depositing a plurality of nanoparticles onto the filler material; depositing an electrode material on the nanoparticles, the ends of the nanowires, and any exposed filler material; and removing the nanoparticles and filler material to form an electrode in contact with the first end of each nanowire; wherein the electrode contains a plurality of perforations.


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