The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 23, 2016

Filed:

Jan. 23, 2012
Applicants:

Daniel Goodman, Lexington, MA (US);

Arthur Keigler, Wellesley, MA (US);

David G. Guarnaccia, Carlisle, MA (US);

Inventors:

Daniel Goodman, Lexington, MA (US);

Arthur Keigler, Wellesley, MA (US);

David G. Guarnaccia, Carlisle, MA (US);

Assignee:

TEL NEXX, INC., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23B 31/14 (2006.01); H01L 21/687 (2006.01); F26B 5/08 (2006.01); B23B 31/12 (2006.01);
U.S. Cl.
CPC ...
B23B 31/14 (2013.01); B23B 31/1261 (2013.01); F26B 5/08 (2013.01); H01L 21/68728 (2013.01); Y10T 279/18 (2015.01); Y10T 279/247 (2015.01);
Abstract

A rotary chuck adapted to hold a substrate. The rotary chuck has a rotatable chuck portion and an edge grip having a movable grip member movably mounted to the rotatable chuck portion, the moveable grip member being substantially free moving so that rotation of the rotating chuck portion causes the moveable grip member to move in a plane substantially aligned with a surface of the substrate to engage the substrate in a engaged position. A resilient element is coupled to the moveable grip member, the resilient member biasing the grip member to a disengaged position.


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