The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
Mar. 21, 2013
Applicant:
Gold Charm Limited, Apia, WS;
Inventor:
Shusaku Kido, Kanagawa, JP;
Assignee:
Gold Charm Limited, Apia, WS;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); G03F 7/20 (2006.01); G03F 7/40 (2006.01); H01L 21/027 (2006.01); H01L 21/67 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66765 (2013.01); G03F 7/2022 (2013.01); G03F 7/40 (2013.01); H01L 21/0273 (2013.01); H01L 21/67225 (2013.01); H01L 27/1288 (2013.01);
Abstract
A method for processing a substrate, the substrate comprising an organic film pattern, the method comprising: a fusion/deformation step of fusing said organic film pattern to deform the fused organic film pattern and a third removal step of removing at least a part of the fused and deformed organic film pattern.