Stress modulation in field effect transistors in reducing contact resistance and increasing charge carrier mobility

Abstract

Field-effect transistor and method of fabrication are provided for, for instance, providing a gate structure disposed over a substrate. The fabricating method further includes forming a source and drain region within the substrate separated by a channel region, the channel region underlying, at least partially, the gate structure. Forming further includes implanting at least one dopant at a pre-selected temperature into the source and drain region to facilitate increasing a concentration of the at least one dopant within the source and drain region, where the implanting of the at least one dopant at the pre-selected temperature facilitates reducing contact resistance of the source and drain region and increasing charge carrier mobility through the channel region.