The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
Aug. 14, 2015
Applicant:
Samsung Display Co., Ltd., Yongin-si, Gyeonggi-do, KR;
Inventors:
Assignee:
Samsung Display Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01); H01L 27/12 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); H01L 23/544 (2006.01); H01L 21/441 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1262 (2013.01); H01L 21/441 (2013.01); H01L 23/544 (2013.01); H01L 29/66969 (2013.01); H01L 29/7869 (2013.01); H01L 2223/54426 (2013.01);
Abstract
A method of manufacturing a display device is disclosed. In one aspect, the method includes forming an active layer over a substrate, forming a first insulating layer over the active layer, forming a gate electrode over the active layer, and forming an alignment mark over the substrate. The forming of the alignment mark includes forming a first layer including a first pattern and forming a second layer over the first layer and including concave and convex portions formed along the first pattern. The first insulating layer is interposed between the first and second layers.