The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
Sep. 09, 2015
Globalfoundries Inc., Grand Cayman, KY;
Dongbing Shao, Wappingers Falls, NY (US);
Lei L. Zhuang, White Plains, NY (US);
Lars W. Liebmann, Poughquag, NY (US);
Lawrence A. Clevenger, LaGrangeville, NY (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
Integrated circuit structures formed using methods herein include a layer, and a material-filled line in the layer. The material-filled line includes a first linear item and a second linear item separated by a separation area of the layer. The first linear item has a first line end where the first linear item contacts the separation area. The second linear item has a second line end where the second linear item contacts the separation area. The first line end and the second line end include line end openings (filled with a material) that increase critical dimension uniformity of the first line end and the second line end.