The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
Jun. 27, 2014
Jeffrey D. Hanna, Spicewood, TX (US);
Robert F. Steimle, Austin, TX (US);
Michael D. Turner, San Antonio, TX (US);
Jeffrey D. Hanna, Spicewood, TX (US);
Robert F. Steimle, Austin, TX (US);
Michael D. Turner, San Antonio, TX (US);
FREESCALE SEMICONDUCTOR, INC., Austin, TX (US);
Abstract
A method of bonding a cap wafer to a device wafer includes heating the device wafer and the cap wafer in the chamber, cooling the device wafer and the cap wafer in the chamber, pressurizing the chamber, introducing gas into the chamber while the chamber is pressurized to accelerate a rate of one of a group consisting of the heating and the cooling, and applying pressure to the device wafer and the cap wafer while a bond is formed between the device wafer and the cap wafer.