The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 16, 2016

Filed:

May. 07, 2014
Applicant:

Param Corporation, Tokyo, JP;

Inventor:

Hiroshi Yasuda, Hasuda, JP;

Assignee:

PARAM CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/30 (2006.01); H01J 3/24 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); H01J 37/143 (2006.01); H01J 37/317 (2006.01); H01J 3/20 (2006.01);
U.S. Cl.
CPC ...
H01J 3/24 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01J 3/20 (2013.01); H01J 37/143 (2013.01); H01J 37/3007 (2013.01); H01J 37/3174 (2013.01); H01J 37/3177 (2013.01); H01J 2237/002 (2013.01); H01J 2237/1405 (2013.01);
Abstract

There provided a device for effectively drawing a fine pattern using a permanent magnet. The device has an outer cylindercomposed of a cylindrical ferromagnet with a Z axis as a central axis, a cylindrical permanent magnetlocated inside the outer cylinder and polarized along the Z axis direction, a correction coillocated inside the cylindrical permanent magnet with a gap from the cylindrical permanent magnet, for adjusting a magnetic field strength generated by the cylindrical permanent magnet along the Z axis direction, and a coolant passagelocated in the gap between the cylindrical permanent magnet and the correction coil, for allowing a coolant to flow therethrough and controlling temperature changes in the cylindrical permanent magnet.


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