The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
May. 07, 2014
Param Corporation, Tokyo, JP;
Hiroshi Yasuda, Hasuda, JP;
PARAM CORPORATION, Tokyo, JP;
Abstract
There provided a device for effectively drawing a fine pattern using a permanent magnet. The device has an outer cylindercomposed of a cylindrical ferromagnet with a Z axis as a central axis, a cylindrical permanent magnetlocated inside the outer cylinder and polarized along the Z axis direction, a correction coillocated inside the cylindrical permanent magnet with a gap from the cylindrical permanent magnet, for adjusting a magnetic field strength generated by the cylindrical permanent magnet along the Z axis direction, and a coolant passagelocated in the gap between the cylindrical permanent magnet and the correction coil, for allowing a coolant to flow therethrough and controlling temperature changes in the cylindrical permanent magnet.