The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
Jan. 21, 2015
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Dong-Min Seo, Hwaseong-si, KR;
Jang-Ik Park, Suwon-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/10 (2006.01); G01N 21/21 (2006.01);
U.S. Cl.
CPC ...
G01N 21/211 (2013.01); G01N 2021/213 (2013.01);
Abstract
In an optical measuring method, a reflected light from a structure on a substrate is detected by a measuring tool to obtain a raw spectrum. The raw spectrum in a wavelength range having spectrum sensitivity to process variation is analyzed to determine a process variation of an actual process performed on the substrate. The raw spectrum is corrected according to a spectrum offset for the measuring tool which is determined based on the process variation.