The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
Jul. 13, 2012
Charlie Koechlin, Bourg la Reine, FR;
Patrick Bouchon, Antony, FR;
Riad Haidar, Paris, FR;
Jean-luc Pelouard, Paris, FR;
Jean-jacques Yon, Sassenage, FR;
Joël Deschamps, Marcoussis, FR;
Fabrice Pardo, Vitry sur Seine, FR;
Stéphane Collin, Cachan, FR;
Charlie Koechlin, Bourg la Reine, FR;
Patrick Bouchon, Antony, FR;
Riad Haidar, Paris, FR;
Jean-Luc Pelouard, Paris, FR;
Jean-Jacques Yon, Sassenage, FR;
Joël Deschamps, Marcoussis, FR;
Fabrice Pardo, Vitry sur Seine, FR;
Stéphane Collin, Cachan, FR;
Abstract
According to one aspect, the invention relates to a microbolometer array for thermal detection of light radiation in a given spectral band, comprising a supporting substrate and an array of microbolometers () of given dimensions, arranged in an array. Each of said microbolometers comprises a membrane () suspended above said supporting substrate, said membrane consisting of an element () for absorbing the incident radiation and a thermometric element () in thermal contact with the absorber, electrically insulated from said absorber element. The absorber element comprises at least one first metal/insulator/metal (MIM) structure comprising a multilayer of three superposed films of submicron-order thickness i.e. a first metallic film (), a dielectric film (), and a second metallic film (), said MIM structure being able to have a resonant absorption of said incident radiation at at least one wavelength in said spectral band. The area of the microbolometer pixel covered by said membrane () is less than or equal to half of the total area of the microbolometer pixel.