The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 16, 2016

Filed:

Nov. 11, 2011
Applicants:

Mirko Holler, Lauchringen, DE;

Jörg Raabe, Villnachern, CH;

Inventors:

Mirko Holler, Lauchringen, DE;

Jörg Raabe, Villnachern, CH;

Assignee:

PAUL SCHERRER INSTITUT, Villigen PSI, CH;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/00 (2006.01); G01S 17/66 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02001 (2013.01); G01B 9/02029 (2013.01); G01B 11/005 (2013.01); G01S 17/66 (2013.01); G01B 2290/70 (2013.01);
Abstract

A laser interferometer and a method for operating a laser interferometer perform a differential position measurement by laser interferometry of two elements while offering a rotational degree of freedom to one of the elements using a reflecting sphere as a mirror for the laser beam. The laser interferometer and method do not require the object to be aligned with the rotation axis, but instead can track the object in off-centered geometries. This is achieved by employing the pointing of the reflected beam from the sphere as a feedback signal to realign the interferometer which then has a constant beam pointing to the center of the sphere in all cases. The laser interferometer and method keep the direction of the measurement constant. The laser interferometer and method are suitable for homodyne and heterodyne types of laser interferometer technology.


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