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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9415461 B1

PDFFull Text
Date of Patent:
Aug. 16, 2016

Filed:

Aug. 09, 2013

Aberration-correcting method, laser processing method using said aberration-correcting method, laser irradiation method using said aberration-correction method, aberration-correction device and aberration-correcting program

Applicant:

Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;

Inventors:

Haruyasu Ito, Hamamatsu, JP;

Naoya Matsumoto, Hamamatsu, JP;

Takashi Inoue, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:

Drinker Biddle & Reath LLP

Primary Examiner:

Samuel M Heinrich

Int. Cl.
CPC ...
B23K 26/06 (2014.01); B23K 26/364 (2014.01); H01L 21/78 (2006.01); G02F 1/01 (2006.01); B23K 26/00 (2014.01); B23K 26/36 (2014.01); B23K 26/03 (2006.01); B23K 26/38 (2014.01); G02B 27/00 (2006.01); B23K 26/40 (2014.01); G02B 5/32 (2006.01);
U.S. Cl.
CPC ...
B23K 26/00 (2013.01); B23K 26/0057 (2013.01); B23K 26/0063 (2013.01); B23K 26/032 (2013.01); B23K 26/06 (2013.01); B23K 26/064 (2015.10); B23K 26/36 (2013.01); B23K 26/364 (2015.10); B23K 26/38 (2013.01); B23K 26/40 (2013.01); G02B 27/0025 (2013.01); G02B 27/0068 (2013.01); B23K 2201/40 (2013.01); B23K 2203/50 (2015.10); G02B 5/32 (2013.01); G02F 1/01 (2013.01); G02F 2203/18 (2013.01);
Abstract

In an aberration-correcting method according to an embodiment of the present invention, in an aberration-correcting method for a laser irradiation devicewhich focuses a laser beam on the inside of a transparent medium, aberration of a laser beam is corrected so that a focal point of the laser beam is positioned within a range of aberration occurring inside the medium. This aberration range is not less than n×d and not more than n×d+Δs from an incidence plane of the medium, provided that the refractive index of the mediumis defined as n, a depth from an incidence plane of the mediumto the focus of the lensis defined as d, and aberration caused by the mediumis defined as Δs.

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