The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Nov. 12, 2013
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Cheol-Min Jang, Yongin, KR;
Myung-Soo Huh, Yongin, KR;
Suk-Won Jung, Yongin, KR;
Jae-Hyun Kim, Yongin, KR;
Sung-Chul Kim, Yongin, KR;
Jin-Kwang Kim, Yongin, KR;
Chang-Woo Shim, Yongin, KR;
Sung-Hun Key, Yongin, KR;
In-Kyo Kim, Yongin, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
A vapor deposition apparatus for depositing a thin film on a substrate, by which a deposition process is efficiently performed and deposition film characteristics are easily improved, and a vapor deposition apparatus including: a stage onto which a substrate is disposed; and a supply unit disposed to face the substrate and having a main body member and a nozzle member disposed on one surface of the main body member facing the substrate, to sequentially supply a plurality of gases towards the substrate, and a method of manufacturing an organic light-emitting display apparatus using the same.