The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2016

Filed:

Dec. 30, 2015
Applicant:

Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;

Inventors:

Hideyuki Okita, Toyama, JP;

Masahiro Hikita, Toyama, JP;

Yasuhiro Uemoto, Toyama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/778 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7789 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/7787 (2013.01); H01L 29/7788 (2013.01);
Abstract

A semiconductor device includes a substrate, a first nitride semiconductor layer formed on the substrate, a p-type nitride semiconductor layer formed on the first nitride semiconductor layer, a recess having a bottom portion which reaches the first nitride semiconductor layer through a part of the p-type nitride semiconductor layer, a third nitride semiconductor layer formed to cover the bottom portion of the recess, a side portion of the recess, and a part of an upper surface of the p-type nitride semiconductor layer. The semiconductor device further includes a fourth nitride semiconductor layer formed on the third nitride semiconductor layer, a first electrode formed on another side of the substrate, a gate electrode formed on the upper surface of the p-type nitride semiconductor layer, and a second electrode that is in contact with the third nitride semiconductor layer or the fourth nitride semiconductor layer. The third nitride semiconductor layer has a bandgap different from a bandgap of the fourth nitride semiconductor layer.


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