The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2016

Filed:

Oct. 07, 2013
Applicant:

Daifuku Co., Ltd., Osaka-shi, KR;

Inventors:

Jae Won Jang, Asan-si, KR;

Ho Geun Lee, Cheonan-si, KR;

Jun Pil Yun, Cheonan-si, KR;

Jung Young Lee, Asan-si, KR;

Sung Goo Choi, Asan-si, KR;

Assignee:

DAIFUKU CO., LTD., Osaka-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); H01L 21/677 (2013.01);
Abstract

The invention provides an apparatus for stocking and purging a wafer at a ceiling. The apparatus includes: a rail that is formed so as to be installed on a ceiling to guide a vehicle; a stock system that is formed so as to be installed on the ceiling and is formed so as to receive a container, which contains wafers, from the vehicle and stock the container; and a purge assembly that is installed so as to communicate with the container through the stock system and is formed so as to purge the wafers, which are contained in the container, with gas.


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