The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Sep. 27, 2012
Applicant:
H.c. Starck, Inc., Newton, MA (US);
Inventors:
Francois-Charles Dary, Boston, MA (US);
Mark Gaydos, Nashua, NH (US);
William Loewenthal, Chesterland, OH (US);
Steven A. Miller, Canton, MA (US);
Gary Rozak, Akron, OH (US);
Scott Jeffrey Volchko, Cleveland, OH (US);
Stefan Zimmermann, Bad Saeckingen, DE;
Michael Thomas Stawovy, Cleveland Heights, OH (US);
Assignee:
H.C. Starck, Inc., Newton, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01); B05D 1/02 (2006.01); B23K 31/02 (2006.01); C23C 24/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3429 (2013.01); B05D 1/02 (2013.01); B23K 31/02 (2013.01); C23C 14/3407 (2013.01); C23C 14/3414 (2013.01); C23C 24/04 (2013.01); H01J 37/3426 (2013.01); Y10T 156/10 (2015.01);
Abstract
In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.