The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Jul. 22, 2014
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Shuji Aoki, Yokohama, JP;
Kazuyuki Ueda, Tokyo, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/02 (2006.01); H01J 35/04 (2006.01); H01J 35/06 (2006.01); H01J 35/08 (2006.01); H01J 35/16 (2006.01); G01N 23/04 (2006.01);
U.S. Cl.
CPC ...
H01J 35/045 (2013.01); H01J 35/06 (2013.01); H01J 35/065 (2013.01); H01J 35/08 (2013.01); H01J 35/16 (2013.01); G01N 23/04 (2013.01); H01J 2235/164 (2013.01);
Abstract
In a multi-source radiation generating apparatus including a plurality of combinations of a cathode and a target, an extraction electrode is disposed for a plurality of cathodes in common. When a potential of the extraction electrode is constant, potentials for the cathodes are selectively switched between a cutoff potential which is higher than the potential of the extraction electrode and an emission potential which is lower than the potential of the extraction electrode.