The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
May. 23, 2013
Applicant:
Globalfoundries Singapore Pte. Ltd., Singapore, SG;
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 7/00 (2006.01); G05D 7/06 (2006.01); F04D 19/04 (2006.01); F04D 27/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05D 7/0617 (2013.01); F04D 19/04 (2013.01); F04D 27/02 (2013.01); H01L 21/67259 (2013.01); H01L 21/67276 (2013.01);
Abstract
A vacuum pump controller and a method of making a devise using the same are presented. The vacuum pump controller comprises detectors for detecting whether a cassette is present in a semiconductor processing load lock; and controllers for sending control signals to a vacuum pump to control the speed voltage of the vacuum pump. The vacuum pump controller may further send control signals to control the supply of N/Hgas, cooling water and other vacuum pump accessories.