The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2016

Filed:

Jun. 20, 2014
Applicants:

Imec, Leuven, BE;

Sony Corporation, Tokyo, JP;

Inventors:

Geert Van der Plas, Leuven, BE;

Ken Sawada, Tokyo, JP;

Yuichi Miyamori, Tokyo, JP;

Ankur Anchlia, Indore, IN;

Abdelkarim Mercha, Brussels, BE;

Assignees:

IMEC, Leuven, BE;

Sony Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/00 (2006.01); G01R 27/26 (2006.01); G01B 7/00 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 27/2605 (2013.01); G01B 7/003 (2013.01); G01R 31/2853 (2013.01);
Abstract

Methods and systems for measuring capacitance difference are disclosed. In one aspect, first and second capacitive elements are connected between voltage receiving nodes for receiving first and second DC voltages and nodes connectable to a third DC voltage via a first, resp. second switch. Further, in a first phase, a voltage difference is applied to charge the capacitive elements and the switches are alternately closed. First resulting currents are measured. Further, in a second phase, the first and second DC voltages are applied alternatingly and the switches are alternately closed. Second resulting currents are measured. The capacitance difference can be determined from the first and second resulting currents.


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