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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9410987 B1

PDFFull Text
Date of Patent:
Aug. 09, 2016

Filed:

Jan. 16, 2015

Probe card

Applicant:

Rohm Co., Ltd., Kyoto, JP;

Inventors:

Goro Nakatani, Kyoto, JP;

Masahiro Sakuragi, Kyoto, JP;

Koichi Niino, Kyoto, JP;

Assignee:

ROHM CO., LTD., Kyoto, JP;

Attorney:

Rabin & Berdo, P.C.

Primary Examiner:

Patrick Assouad

Assistant Examiner:

Sean Curtis

Int. Cl.
CPC ...
G01R 1/073 (2006.01); H05K 3/40 (2006.01); G01R 31/26 (2014.01); G01R 3/00 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07307 (2013.01); G01R 1/07342 (2013.01); G01R 31/26 (2013.01); H05K 3/4084 (2013.01); G01R 3/00 (2013.01); H05K 2203/0195 (2013.01); Y10T 29/41 (2015.01); Y10T 29/49002 (2015.01); Y10T 29/49147 (2015.01); Y10T 29/49149 (2015.01); Y10T 29/49151 (2015.01); Y10T 29/49155 (2015.01); Y10T 29/49165 (2015.01);
Abstract

A probe card includes a board or silicon substrate; a plurality of probes (terminals) at a first surface of the board, the respective probes having a first extending portion extending along the first surface of the board; a plurality of through-holes formed in correspondence to the respective probes and penetrating between the first and second surfaces of the board; through electrodes embedded in the respective through-holes and conductively connected to the probes in the respective through-holes; and a wiring at the second surface of the board conductively connected to the through electrodes, the wiring having a second extending portion extending along the second surface of the board, wherein the first extending portion and the second extending portion extend in different directions from each other, and a space is formed across the entire width of the first extending portion between the first extending portion and the first surface of the board.

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