The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2016

Filed:

Feb. 11, 2014
Applicant:

Hitachi, Ltd., Chiyoda-ku, Tokyo, JP;

Inventors:

Hisashi Endo, Tokyo, JP;

Soshi Narishige, Tokyo, JP;

Mitsuteru Inoue, Toyohashi, JP;

Hiroyuki Takagi, Toyohashi, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/82 (2006.01); G01N 27/72 (2006.01); H01J 37/26 (2006.01); G01N 21/21 (2006.01); G01R 33/032 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G01N 27/82 (2013.01); G01R 33/0322 (2013.01); G01N 21/21 (2013.01); G01N 21/8806 (2013.01); G01N 27/72 (2013.01); G01R 33/032 (2013.01);
Abstract

Provided are an inspection device and an inspection method capable of achieving improved magnetic field sensitivity by using a magnetic thin film of a small film thickness. A light-emitting unitemits light of a first wavelength for acquiring magnetic field inspection information and a second wavelength for acquiring inspection object surface information. A selection unitselects information from an inspection objectand information from a magnetophotonic crystal filmacquired by light irradiation performed by an irradiation unit. An image generation unitgenerates image data based on the magnetic field inspection information acquired with the first wavelength and the inspection object surface information acquired with the second wavelength selected by the selection unit. Each of the generated image data is displayed on a display unit


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