The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2016

Filed:

Mar. 04, 2013
Applicant:

Illinois Tool Works Inc., Glenview, IL (US);

Inventors:

Bill Valentine, Glenview, IL (US);

Chris Ellec, Glenview, IL (US);

Berwin Banares, Glenview, IL (US);

John Lull, Glenview, IL (US);

Anthony Kehoe, Glenview, IL (US);

Assignee:

Illinois Tool Works Inc., Glenview, IL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/80 (2006.01); G01F 1/74 (2006.01); G01F 25/00 (2006.01); G01F 1/34 (2006.01);
U.S. Cl.
CPC ...
G01F 1/74 (2013.01); G01F 1/34 (2013.01); G01F 25/0007 (2013.01);
Abstract

The disclosed embodiments include a method, apparatus, and computer program product for verifying a performance of a mass flow controller or mass flow meter on a tool. For example, the disclosed embodiments include a method and a mass flow controller configured to perform, in-situ, by the mass flow controller, a rate of decay measurement during on-line operation of the tool to identify valve leak issues and/or for performing a flow measurement.


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