The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Dec. 14, 2011
Applicants:
Geoffrey Alan Scarsbrook, Ascot, GB;
Jonathan James Wilman, Ascot, GB;
Helen Wilman, Ascot, GB;
Joseph Michael Dodson, Ascot, GB;
John Robert Brandon, Ascot, GB;
Steven Edward Coe, Ascot, GB;
Christopher John Howard Wort, Ascot, GB;
Inventors:
Geoffrey Alan Scarsbrook, Ascot, GB;
Jonathan James Wilman, Ascot, GB;
Joseph Michael Dodson, Ascot, GB;
John Robert Brandon, Ascot, GB;
Steven Edward Coe, Ascot, GB;
Christopher John Howard Wort, Ascot, GB;
Assignee:
Element Six Technologies Limited, Didcot, GB;
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/27 (2006.01); C23C 16/511 (2006.01); C30B 25/10 (2006.01); C30B 29/04 (2006.01); H01J 37/32 (2006.01); C01B 31/06 (2006.01);
U.S. Cl.
CPC ...
C23C 16/274 (2013.01); C01B 31/06 (2013.01); C23C 16/511 (2013.01); C30B 25/105 (2013.01); C30B 29/04 (2013.01); H01J 37/32192 (2013.01); H01J 37/32642 (2013.01); H01J 2237/339 (2013.01);
Abstract
A microwave plasma reactor for manufacturing synthetic diamond material via chemical vapour deposition, the microwave plasma reactor comprising: