The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Mar. 26, 2015
Samsung Display Co., Ltd., Yongin, KR;
Hyun Ju Kang, Pocheon-si, KR;
Sang Woo Sohn, Yongin-si, KR;
Sang Won Shin, Yongin-si, KR;
Dong Hee Lee, Hwaseong-si, KR;
Chang Oh Jeong, Suwon-si, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
Provided are a sputtering device and a method of forming a layer using the same. The method of forming a layer using the sputtering device includes: placing a substrate within a chamber; depositing target particles emitted from a target, which faces the substrate, on the substrate using a sputtering process; and horizontally moving a plurality of shield rods, which are installed in a shield mask disposed between the substrate and the target and are separated from each other along a first direction, during the sputtering process.