The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Jan. 14, 2014
Applicant:
AZ Electronic Materials (Luxembourg) S.a.r.l., Somerville, NJ (US);
Inventors:
Venkata Gopal Reddy Chada, Bridgewater, NJ (US);
Huirong Yao, Plainsboro, NJ (US);
Salem Mullen, Florham Park, NJ (US);
Elizabeth Wolfer, Bethlehem, PA (US);
Alberto D. Dioses, Doylestown, PA (US);
JoonYeon Cho, Bridgewater, NJ (US);
Munirathna Padmanaban, Bridgewater, NJ (US);
Assignee:
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L., Luxembourg, LU;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C01G 31/00 (2006.01); C01G 39/00 (2006.01); C01G 41/00 (2006.01); H01L 21/033 (2006.01);
U.S. Cl.
CPC ...
C01G 41/00 (2013.01); C01G 31/00 (2013.01); C01G 39/00 (2013.01); G03F 7/0047 (2013.01); H01L 21/0332 (2013.01);
Abstract
The present invention relates to a novel spin coatable composition comprising The present invention further relates to processes using the novel compositions.
Chada, Venkata Gopal Reddy. (2016). Spin coatable metallic hard mask compositions and processes thereof (U.S. Patent No. 9409793). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9409793
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile